VACUUM SPUTTERING MODE TYPE MANUFACTURING METHOD OF LAMINATED CERAMIC CAPACITOR (MLCC) COMPRISING DIELECTRIC CERAMIC LAYER AND INNER-ELECTRODE LAYER

摘要

PROBLEM TO BE SOLVED: To provide a vacuum sputtering mode type manufacturing method of a laminated ceramic capacitor (MLCC) comprising dielectric ceramic layers and inner-electrode layers wherein its denseness is so high that the thickness of its dielectric ceramic layer is 1-5 μm and the thickness of its inner-electrode layer is 0.1-0.5 μm, and in the present stage, its industrial usefulness is surely high since it is adapted to the need required as a laminated ceramic capacitor component having a large capacity and a small size.;SOLUTION: In the vacuum sputtering mode type manufacturing method of a laminated ceramic capacitor (MLCC) comprising dielectric ceramic layers and inner-electrode layers, its dielectric ceramic layers and its inner-electrode layers are manufactured by a vacuum sputtering mode. The laminated ceramic capacitor (MLCC) component is manufactured in the processes programmed by nano.;COPYRIGHT: (C)2006,JPO&NCIPI