The beam current measurement equipment and the beam current measuring method which uses this

摘要

The measurement equipment and the measuring method which resistance noise characteristic can be high, actualize the beam current measurement of high sensitivity are offered. The magnetic field sensor which is allotted to the cover space which is formed by the magnetic screening section (8) for external magnetic field cover and the aforementioned magnetic screening section it has (2), being the beam current measurement equipment which measures the magnetic field where the beam current which it should measure forms with the aforementioned magnetic field sensor, it designates the magnetic flux - return electric current transfer coefficient of the aforementioned magnetic field sensor as above 810-15WB/A.