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Beam current measuring instrument and beam current measuring method using same
Beam current measuring instrument and beam current measuring method using same
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机译:束电流测量仪及使用其的束电流测量方法
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摘要
The invention provides a nondestructive measuring method and measuring apparatus that assures a high noise immunity and is capable of performing high-accuracy beam current measurements. The inventive beam current measuring apparatus includes a magnetism shielding part for shielding an external magnetic field and a magnetic field sensor arranged in the shielding space generated by said magnetism shielding part, said beam current measuring apparatus measuring, by using said magnetic field sensor, a magnetic field where a beam current to be measured is generated, characterized in that said magnetic field sensor has a magnetic flux/feedback current conversion coefficient of 8×10−15 Wb/A or above.
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