Formation manner of micro pattern, micro pattern, the process which forms the organicity monomolecular film in production manner of mold for micro pattern transcription formation

摘要

PROBLEM TO BE SOLVED: To provide a new method capable of forming a micro-pattern of high density by a simple process.;SOLUTION: After forming an organic single molecular film 12 on a 1st substrate 11, the organic single molecular film 12 is finely worked by photolithographic technology to form an organic single molecular film pattern 14. Then a thin film 15 is allowed to selectively grow on the organic single molecular film pattern 14, and transferred to a 2nd substrate 16 to form a micro-pattern 17 consisting of the thin film 15 on the 2nd substrate 16.;COPYRIGHT: (C)2005,JPO&NCIPI