Containment one end aspect of the sample which is offered to the sample holder for profile TEM

摘要

PROBLEM TO BE SOLVED: To provide a sample holder allowing the machining of a sample by a focus ion beam device while the sample is fitted on a sample forming base, requiring no fitting/removing of the sample, and easily allowing the work in a short time by dividing the sample holder for transmission type electron microscope observation into a device fitting section and the sample forming base. ;SOLUTION: A sample holder 10 for transmission type electron microscope(TEM) is constituted of a sample forming base 11 and a device fitting section 12, and the sample forming base 11 and the device fitting section 12 can be freely assembled or disassembled. The device fitting section 12 is provided with a notch for avoiding a sample 13 fitted to the sample forming base 11. The sample 13 is fitted at the center section of the end face of the sample forming base 11 by an adhesive, and the sample 13 is machined by a focus ion beam (FIB) device. After the sample formation is finished, the sample forming base 11 and the device fitting section 12 are integrated for a TEM observation. The sample 13 is not required to be fitted/removed many times, the work can be easily conducted in a short time, and the sample holder 10 having an improved sample forming yield is obtained.;COPYRIGHT: (C)1997,JPO