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Organic thin-film transistor and process for fabricating the same, active matrix type display employing it and radio identification tag

机译:有机薄膜晶体管及其制造方法,采用该薄膜晶体管和无线电识别标签的有源矩阵型显示器

摘要

An organic thin film transistor of the present invention includes a substrate (11) and a semiconductor layer (14) made of an organic semiconductor and formed on the substrate (11). The semiconductor layer (14) is composed of crystals of the organic semiconductor, and a crystal phase of the crystals is the same as a crystal phase of energetically most stable bulk crystals of the organic semiconductor. A method for manufacturing the organic thin film transistor of the present invention includes forming the semiconductor layer (14) by depositing an organic semiconductor on the substrate (11). The organic semiconductor is deposited at a deposition rate of 0.1 to 1 nm/min while maintaining the temperature of the substrate (11) in the range of 40 to 150° C.
机译:本发明的有机薄膜晶体管包括基板( 11 )和由有机半导体制成并形成在基板(上)的半导体层( 14 )。 11 )。半导体层( 14 )由有机半导体的晶体构成,并且该晶体的晶相与能量上最稳定的有机半导体的块状晶体的晶相相同。用于制造本发明的有机薄膜晶体管的方法包括通过在基板( 11 )上沉积有机半导体来形成半导体层( 14 )。以0.1至1 nm / min的沉积速率沉积有机半导体,同时将基板( 11 )的温度保持在40至150°C的范围内。

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