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CARBON-NANOTUBE COLD CATHODE AND METHOD FOR FABRICATING THE SAME
CARBON-NANOTUBE COLD CATHODE AND METHOD FOR FABRICATING THE SAME
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机译:碳纳米管冷阴极及其制造方法
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摘要
A method for fabricating a carbon-nanotube cold cathode is described. A conductive layer is formed on a substrate, and then a metal film is selectively formed on predetermined emitter regions of the conductive layer. An anodization treatment is done to the metal film to form numerous nanopores through the metal film. Thereafter, carbon nanotubes are deposited into the nanopores through electrodeposition, wherein one end of each carbon nanotube is exposed outside a corresponding nanopore of the metal film.
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