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Multilayer interference filter, manufacturing method for multilayer interference filter, solid-state imaging device and camera
Multilayer interference filter, manufacturing method for multilayer interference filter, solid-state imaging device and camera
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机译:多层干涉滤光片,多层干涉滤光片的制造方法,固态成像装置和照相机
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摘要
A color filter is made from a silicon nitride, and has a multilayer structure including a silicon nitride layer and an airlayer. A multilayer film that selectively transmits green light has a seven-layer structure, in which two silicon nitride layers and one air layer is formed both above and below a spacer layer which is the air layer. On the other hand, each of a multilayer film that selectively transmits red light and a multilayer film that selectively transmits blue light has a silicon nitride layer as the spacer layer, and two silicon nitride layers and two air layers are formed both above and below the spacer layer. The silicon nitride layer is held by a holding part at a periphery thereof. Also, a hole is formed between multilayers for a manufacturing reason.
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