Planar waveguides with air thin films used as anti-reflective layers, beam splitters and mirrors

摘要

Integrated structures including a waveguide that passes through each of the sections, with the waveguide further including an in-waveguide mirror, a beam splitter or an anti-reflective element. The in-waveguide mirror, beam splitter or anti-reflective element are formed by using one or more focused ion beam (FIB) cuts or slits through the waveguide. The cuts or slits used for the mirrors, beam splitters and anti-reflective elements all have high aspect ratios. The mirrors include one slit extending through the core, perpendicular to an axis of the core; the beam splitters include a single slit extending through the core at an angle with respect to an axis of the core; and the anti-reflective elements include a pair of spaced apart slits extending through the core, perpendicular to an axis of the core.