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Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads
Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads
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机译:软化学机械平面化/抛光(CMP)抛光垫的金刚石修整
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摘要
Conditioning of chemical mechanical planarization (CMP) using conventional diamond-embedded abrasive strips are well suited to condition conventional “hard” polishing but not soft polishing pads because the diamonds not only remove waste material, but they also damage the polishing surface of the pad. Embodiments of the present invention condition soft polishing pads using diamond strips without damaging the soft polishing pad.
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