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Microelectronic devices, methods for forming vias in microelectronic devices, and methods for packaging microelectronic devices

机译:微电子器件,在微电子器件中形成通孔的方法以及封装微电子器件的方法

摘要

Microelectronic devices, methods for packaging microelectronic devices, and methods for forming vias and conductive interconnects in microfeature workpieces and dies are disclosed herein. In one embodiment, a method includes forming a bond-pad on a die having an integrated circuit, the bond-pad being electrically coupled to the integrated circuit. A conductive line is then formed on the die, the conductive line having a first end portion attached to the bond-pad and a second end portion spaced apart from the bond-pad. The method can further include forming a via or passage through the die, the bond-pad, and the first end portion of the conductive line, and depositing an electrically conductive material in at least a portion of the passage to form a conductive interconnect extending at least generally through the microelectronic device.
机译:本文公开了微电子器件,用于封装微电子器件的方法以及用于在微特征工件和管芯中形成通孔和导电互连的方法。在一个实施例中,一种方法包括在具有集成电路的管芯上形成焊盘,该焊盘电耦合到集成电路。然后,在管芯上形成导线,该导线具有附接到键合焊盘的第一端部和与键合焊盘间隔开的第二端部。该方法可以进一步包括形成穿过管芯,键合焊盘和导电线的第一端部的通孔或通道,以及在该通道的至少一部分中沉积导电材料以形成在该处延伸的导电互连。至少通常通过微电子设备。

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