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Field emission type cold cathode device, manufacturing method thereof and vacuum micro device
Field emission type cold cathode device, manufacturing method thereof and vacuum micro device
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机译:场发射型冷阴极器件,其制造方法和真空微器件
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摘要
A field emission type cold cathode device comprises a substrate, and a metal plating layer formed on the substrate, the metal plating layer contains at least one carbon structure selected from a group of fullerenes and carbon nanotubes, the carbon structure is stuck out from the metal plating layer and a part of the carbon structure is buried in the metal plating layer.
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