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Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height

机译:固定层宽度大于自由层条纹高度的磁阻读取头的制造方法

摘要

A method for making a magnetoresistive read head so that the pinned ferromagnetic layer is wider than the stripe height of the free ferromagnetic layer uses ion milling with the ion beam aligned at an angle to the substrate supporting the stack of layers making up the read head. The stack is patterned with photoresist to define a rectangular region with front and back long edges aligned parallel to the read head track width. After ion milling in two opposite directions orthogonal to the front and back long edges, the pinned layer width has an extension. The extension makes the width of the pinned layer greater than the stripe height of the free layer after the substrate and stack of layers are lapped. The length of the extension is determined by the angle between the substrate and the ion beam and the thickness of the photoresist.
机译:一种制造磁阻读取头以使固定铁磁层宽于自由铁磁层的条带高度的方法是使用离子铣削,离子束与支撑构成读取头的层堆叠的基板成一定角度排列。用光致抗蚀剂对叠层进行构图,以限定矩形区域,该矩形区域的前后长边缘平行于读取头轨道宽度对齐。在与前后长边缘正交的两个相反方向上进行离子铣削后,固定层的宽度会扩展。延伸使固定层和叠层重叠后固定层的宽度大于自由层的条纹高度。延伸的长度由基板和离子束之间的角度以及光刻胶的厚度确定。

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