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Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height
Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height
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机译:固定层宽度大于自由层条纹高度的磁阻读取头的制造方法
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摘要
A method for making a magnetoresistive read head so that the pinned ferromagnetic layer is wider than the stripe height of the free ferromagnetic layer uses ion milling with the ion beam aligned at an angle to the substrate supporting the stack of layers making up the read head. The stack is patterned with photoresist to define a rectangular region with front and back long edges aligned parallel to the read head track width. After ion milling in two opposite directions orthogonal to the front and back long edges, the pinned layer width has an extension. The extension makes the width of the pinned layer greater than the stripe height of the free layer after the substrate and stack of layers are lapped. The length of the extension is determined by the angle between the substrate and the ion beam and the thickness of the photoresist.
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