Method of fabricating polymer waveguides for passive alignment to optical fibers in an optical module

摘要

Is provided a method of forming a polymer waveguide for passive alignment to an optical fiber in an optical module. A groove mounting an optical fiber thereon is formed on a substrate, and a shielding layer pattern is formed to selectively shield the groove. Polymer layers for an optical waveguide, which extend to the shielding layer pattern, are formed on the substrate, and the layers are patterned, thereby forming a polymer waveguide. The shielding layer is removed, and the groove is exposed. An optical fiber aligned to the optical waveguide is mounted on the exposed groove.