High performance controller for shifting resonance in micro-electro-mechanical systems (MEMS) devices

摘要

Devices being controlled electronically via physical manipulation often display a resonance. In many circumstances, the frequency range of operation is not close to the resonance frequency. In these cases, the resonance can be removed through the use of simple compensation techniques such as filters. However, when the resonance frequency is close to the frequency range of operation and when the resonance frequency can change depending on temperature, time, and physical position of the device, simple compensation techniques cannot be used. The present invention presents a non-mechanical technique for providing compensation for devices with a shifting resonance. The non-mechanical technique allows for the compensation to be performed via computation.