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Use of highly purified hydrocarbons in vacuum ultraviolet applications
Use of highly purified hydrocarbons in vacuum ultraviolet applications
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机译:在真空紫外线应用中使用高纯度碳氢化合物
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摘要
The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
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