Aluminum nitride sintered compact, metallized substrate, heater, jig and method for producing aluminum nitride sintered compact

摘要

Provided is an aluminum nitride sintered body having a larger area and a smaller thickness as compared to the conventional art, wherein the aluminum nitride sintered body has flatness with controlled warpage and/or waviness height. Methods of producing such sintered body, and further a metallized substrate and a heater using such sintered body are also provided. ;An aluminum nitride substrate 1 has a maximum length of 320 mm or more, a thickness of more than 0 mm and 2 mm or less, a warpage of 0 μm/mm or more and less than 2 μm/mm, and a local waviness height of 0 μm or more and 100 μm or less.