Fabrication and residual stresses of aluminum nitride ceramics sintered at high-pressure

摘要

High-density AlN ceramics were fabricated without sintering additives at high pressure(5.0 GPa) and temperature(1300～1800℃).The sintered bodies were characterized by XRD,SEM and micro-Raman spectroscopy(MRS).Controlling fracture mode was intragranular when the sintering temperature was as low as 1400℃under 5.0 GPa.The values of residual stresses due to the distortion of the AlN lattice were assessed using the Micro-Raman Spectroscopy(MRS).The residual compression stress of the AlN ceramics sintered at 5.0 GPaand 1700℃for 125 min is 2.0 GPa.The residual compression stress is increased according to the extension of the sintering time.