METAL OXIDE CERAMIC THIN FILM ON BASE METAL ELECTRODE

摘要

A method including forming a capacitor structure including an electrode material and a ceramic material on the electrode material; and sintering the ceramic material under a condition where a point defect state of the ceramic material defines the ceramic material as insulating without oxidation of the electrode material. A method including depositing a ceramic material on an electrically conductive foil; and sintering the ceramic material in a reducing atmosphere at a temperature that minimizes the mobility of point defects to transition to a level corresponding to a greater conductivity of the ceramic material. An apparatus including a first electrode; a second electrode; and a ceramic material disposed between the first electrode and the second electrode, wherein the ceramic material includes a thickness less than one micron and a leakage current corresponding to a thermodynamic state wherein a concentration of mobile point defects have been optimized.