Infrared absorption measurement method, infrared absorption measurement device, and method of manufacturing semiconductor device

摘要

An infrared absorption measurement method includes: (a) measuring infrared absorption of a measurement target component in a state in which a sample gas including the measurement target component is decompressed; (b) calculating an absorption area in a peak region of the measurement target component in the infrared absorption shown in a graph which shows the relationship between the wave number and absorbance of the sample gas; and (c) calculating a concentration of the measurement target component in the sample gas based on the absorption area and pressure of the sample gas during decompression.