首页>
外国专利>
Methods for reducing the curvature in boron-doped silicon micromachined structures
Methods for reducing the curvature in boron-doped silicon micromachined structures
展开▼
机译:降低掺硼硅微机械结构曲率的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Layers of boron-doped silicon having reduced out-of-plane curvature are disclosed. The layers have substantially equal concentrations of boron near the top and bottom surfaces. Since the opposing concentrations are substantially equal, the compressive stresses on the layers are substantially balanced, thereby resulting in layers with reduced out-of-plane curvature.
展开▼