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CMOS-type photodetector for improved charge transfer from the photodetector to a MOS transistor
CMOS-type photodetector for improved charge transfer from the photodetector to a MOS transistor
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机译:CMOS型光电探测器,可改善从光电探测器到MOS晶体管的电荷转移
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摘要
A photodetector formed in an active area of a semiconductor substrate of a first conductivity type, including a MOS transistor and a photodiode formed of the junction between the substrate and a region of a second conductivity type also forming the source of the MOS transistor, a heavily-doped layer of the first conductivity type covering the source region and a portion of the substrate, said portion of the substrate being delimited by an opening of the source region extending in a centered manner from the side of the source region opposite to the channel region of the transistor, towards this channel region.
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