A CAPACITIVE PICK OFF SENSOR FOR A MASS FLOWMEASUREMENT DEVICE AND A CORIOLIS MASS FLOW SENSOR.

摘要

CORIOLIS MASS FLOW CONTROLLER. A CORIOLIS MASS FLOW SENSOR INCLUDES A FLOW SENSOR TUBE, A DRIVE DEVICE SITUATED RELATIVE TO THE FLOW SENSOR TUBE SO AS TO CAUSE THE FLOW SENSORTUBE TO VIBRATE, AND PICK OFF SENSOR IS DISCLOSED THAT INCLUDES AT LEAST ONE CONDUCTIVE PLATE CONNECTABLE TO A FIRST VOLTAGE POTENTIAL AND ADAPTED TO BE SITUATED ADJACENT THE FLOW SENSOR TUNE WHICH IS CONNECTED TO A SECOND VOLTAGE POTENTIAL. tHE CONDUCTIVE PLATE IS POSITIONED RELATIVE TO THE FLOW SENSOR TUNE SO AS TO DEFINE A GAP THEREBETWEEN. THE CAPACITANCE BETWEEN THE CONDUCTIVE PLATE AND THE FLOW SENSOR TUBE VARIES DUE TO THE RELATIVE MOTION OF THE CONDUCTIVE PLATE AND THE FLOW SENSOR TUBE WHEN THE FLOW SENSOR TUBE IS VIBRATED. ELECTROMAGNETIC, ELECTROSTATIC, ACOUSTIC, AND/OR PIEZOELECTRIC DRIVES MAY BE USED TO VIBRATE THE FLOW SENSOR TUBE. THE CORIOLIS MASS FLOW CONTROLLER MAY FURTHER INCLUDE AN INTEGRATED FLOW CONTROL DEVICE ADAPTED TO RECEIVE FLUID FROM THE FLOW SENSOR TUBE AND PROVIDE FLOW CONTROL.