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METHOD OF FORMING NANO-SCALE STRUCTURES FROM POLYCRYSTALLINE MATERIALS AND NANO-SCALE STRUCTURES FORMED THEREBY
METHOD OF FORMING NANO-SCALE STRUCTURES FROM POLYCRYSTALLINE MATERIALS AND NANO-SCALE STRUCTURES FORMED THEREBY
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机译:由多晶材料形成纳米尺度结构的方法及由此形成的纳米尺度结构
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摘要
A METHOD OF FORMING NANO-SCALE FEATURES WITH CONVENTIONAL MULTILAYER STRUCTURE, AND NANO-SCALE FEATURES FORMED THEREBY. THE METHOD GENERALLY ENTAILS FORMING A MULTILAYER STRUCTURE THAT INCLUDES A POLYCRYSTALLINE LAYER AND AT LEAST ONE CONSTRAINING LAYER. THE MULTILAYER STRUCTURE IS PATTERNED TO FORM FIRST AND SECOND STRUCTURES, EACH OF WHICH INCLUDES THE POLYCRYSTALLINE AND CONSTRAINING LAYERS. AT LEAST THE FIRST STRUCTURE IS THEN LOCALLY HEATED, DURING WHICH TIME THE CONSTRAINING LAYER RESTRICTS THE THERMAL EXPANSION OF THE POLYCRYSTALLINE LAYER OF THE FIRST STRUCTURE. AS A RESULT, STRESSES ARE INDUCED IN THE POLYCRYSTALLINE LAYER OF THE FIRST STRUCTURE. AS A RESULT, STRESSES ARE INDUCED IN THE POLYCRYSTALLINE LAYER OF THE FIRST STRUCTURE, CAUSING SUBSTANTIALLY TWO-DIMENSIONAL GRAIN GROWTH FROM THE EDGE OF THE FIRST STRUCTURE. SUFFICIENT GRAIN GROWTH OCCURS TO PRODUCE A THIRD STRUCTURE WHICH, BASED ON THE GRAIN SIZE OF THE POLYCRYSTALLINE LAYER, WILL BE A NANO-SCALE STRUCTURE. WHEN APPROPRIATELY CONFIGURED, NANO-SCALE STRUCTURES CAN BE FORMED AS OPERATIVE COMPONENTS OF ELECTRICAL, MENCHANICAL, OPTICAL AND FLUID-HANDLING DEVICES. FIGURE 3
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