首页> 外国专利> METHOD OF MAGNETICALLY PATTERNING A THIN FILM BY MASK-CONTROLLED LOCAL PHASE TRANSITION

METHOD OF MAGNETICALLY PATTERNING A THIN FILM BY MASK-CONTROLLED LOCAL PHASE TRANSITION

机译:通过面膜控制的局部相变磁化薄膜的方法

摘要

A method of producing a patterned magnetic nanostructure is disclosed. Themethod includes providing a substrate having a non-magnetic single layer or multi layerfilm that can be converted into a magnetic state by annealing and/or mixing. The methodfurther includes positioning a mask having a desired pattern and resolution associatedwith the patterned magnetic nanostructure on or over the film. The method additionallyincludes subjecting the mask-covered substrate to a beam of radiation (focussed orunfocussed) having sufficient energy to locally anneal and/or mix the non-magnetic orweak-magnetic single-layer or multi layer film. Because of the mask effect, only thedesired portions of the non-magnetic film are exposed to the beam of radiation. As such,the desired portions of the non-magnetic film are changed from a non-magnetic to amagnetic state to produce an array of magnetic elements in a non-magnetic matrix. Thesize of each magnetic element is dependent on the resolution of mask.
机译:公开了一种产生图案化的磁性纳米结构的方法。的该方法包括提供具有非磁性单层或多层的基板可以通过退火和/或混合转化成磁性态的薄膜。方法进一步包括定位具有期望图案和分辨率的掩模薄膜上或薄膜上具有图案化的磁性纳米结构。该方法另外包括使覆盖有掩膜的基板受到辐射束的影响(聚焦或具有足够的能量以局部退火和/或混合非磁性或非磁性材料弱磁性单层或多层膜。由于蒙版效果,只有非磁性膜的期望部分暴露于辐射束。因此,非磁性膜的所需部分从非磁性变为磁性状态以在非磁性矩阵中产生磁性元素阵列。的每个磁性元件的尺寸取决于掩模的分辨率。

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