首页> 外国专利> CORRECTING METHOD, PREDICTING METHOD, EXPOSURING METHOD, REFLECTANCE CORRECTING METHOD, REFLECTANCE MEASURING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

CORRECTING METHOD, PREDICTING METHOD, EXPOSURING METHOD, REFLECTANCE CORRECTING METHOD, REFLECTANCE MEASURING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

机译:校正方法,预测方法,曝光方法,反射率校正方法,反射率测量方法,曝光装置和设备制造方法

摘要

A second detection beam is received by a reference illuminance monitor (second sensor) without passing the second detection beam through a liquid-repellent film, and the output (Pref) of the reference illuminance monitor corresponding to the amount of light of the received beam is acquired (step 322). A first detection beam is received by a first sensor after passing the beam through a liquid-repellent film, and the output (Pi) of the first sensor corresponding to the amount of light of the received beam is acquired (step 306). From the output of the first sensor and the output of the reference illuminance monitor, correction information δ (or Ϝ) used to correct the output of the first sensor is acquired (steps 324 to 332). Correct energy information not influenced by the variation of the beam transmittance of the liquid-repellent film is collected.
机译:基准照度监视器(第二传感器)接收第二检测光束,而不使第二检测光束穿过疏液膜,并且对应于所接收光束的光量的基准照度监视器的输出(Pref)为获取(步骤322)。在使第一检测光束通过疏液膜之后,第一传感器接收第一检测光束,并且获取与接收到的光束的光量相对应的第一传感器的输出(Pi)(步骤306)。从第一传感器的输出和参考照度监视器的输出,获取用于校正第一传感器的输出的校正信息δ(或or)(步骤324至332)。收集不受疏液膜的光束透射率的变化影响的正确的能量信息。

著录项

  • 公开/公告号WO2005117075A1

    专利类型

  • 公开/公告日2005-12-08

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;SUZUKI KOUSUKE;

    申请/专利号WO2005JP09536

  • 发明设计人 SUZUKI KOUSUKE;

    申请日2005-05-25

  • 分类号H01L21/027;G01N21/55;G01N21/59;G03F7/20;

  • 国家 WO

  • 入库时间 2022-08-21 21:33:30

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