Calibration method, the prediction method, exposure method, reflectance measurement method and reflectance calibration method, exposure apparatus, and device manufacturing method

摘要

Get output of the reference illuminance monitor that receives the detection beam of the second reference illuminance monitor the (second sensor) without passing through the liquid-repellent film, corresponding to the received light amount (Pref _i) (step 322). Also, to get the output of the first sensor for receiving a first sensor through a liquid-repellent film to detect the first beam corresponding to the received light amount (P _i) (step 306). Then, it acquires calibration information for based on the output of the reference illuminance monitor the output of the first sensor, to calibrate the output of the first sensor δ (or γ) a (step 324-332). I obtain accurate energy information which is not affected by the beam transmittance change of the liquid repellent film.