COATED SPHERICAL SILICON NANOPARTICLE THIN FILM UV DETECTOR WITH UV RESPONSE AND METHOD OF MAKING

摘要

A UV detector has a UV detection thin film of coated spherical silicon nanoparticles formed upon a substrate. The detector includes structures to bias the thin film. In preferred embodiments, a thin conductor that is at least semi-transparent to UV radiation is formed over the thin film. In preferred embodiments, the UV detector is formed as a silicon based integration, upon a device quality silicon wafer.