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Coated spherical silicon nanoparticle thin film UV detector with UV response and method of making
Coated spherical silicon nanoparticle thin film UV detector with UV response and method of making
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机译:具有紫外线响应的涂层球形硅纳米颗粒薄膜紫外线探测器及其制备方法
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摘要
A UV detector has a UV detection thin film of coated spherical silicon nanoparticles formed upon a substrate. The detector includes structures to bias the thin film. In preferred embodiments, a thin conductor that is at least semi-transparent to UV radiation is formed over the thin film. In preferred embodiments, the UV detector is formed as a silicon based integration, upon a device quality silicon wafer.
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