Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby

摘要

The integrated microactuator (1) has a stator (3) and a rotor (4) having a circular extension with radial arms (23, 6) which support electrodes (24, 12) extending in a substantially circumferential direction and interleaved with one another. For the manufacture, first a sacrificial region (34) is formed on a silicon substrate (2); an epitaxial layer (37) is then grown; the circuitry electronic components (45) and the biasing conductive regions (26, 43) are formed; subsequently a portion of substrate (2) beneath the sacrificial region (34) is removed, forming an aperture extending through the entire substrate; the epitaxial layer (37) is excavated to define and separate from one another the rotor (4) and the stator (3), and finally the sacrificial region (34) is removed to release the mobile structures from the remainder of the chip.