OPTICAL ELEMENT MANUFACTURING METHOD, OPTICAL ELEMENT, NIPKOW DISC, CONFOCAL OPTICAL SYSTEM, AND 3D MEASUREMENT DEVICE

摘要

There is provided an optical element manufacturing method. A light shielding layer (14) containing a Si layer at least on the uppermost layer is arranged on a substrate (12) as a base material. An optical aperture (14a) is formed in the light shielding layer (14). By dry etching, a fine structure MR is formed on the surface of the uppermost layer.