OPTICAL ELEMENT MANUFACTURING METHOD, OPTICAL ELEMENT, NIPKOW DISC, CONFOCAL OPTICAL SYSTEM, AND 3D MEASUREMENT DEVICE

摘要

An optical element manufacturing method includes: disposing a light-shielding layer (14) that includes at least an Si layer as an uppermost layer, on a substrate (12) used as a base member, forming an optical aperture (14a) at the light-shielding layer (14) and forming a fine recession/projection structure (MR) at a surface of the uppermost layer through dry etching.