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MICRO-MACHINED MULTI-SENSOR PROVIDING 1-AXIS OF ACCELERATION SENSING AND 2-AXES OF ANGULAR RATE SENSING
MICRO-MACHINED MULTI-SENSOR PROVIDING 1-AXIS OF ACCELERATION SENSING AND 2-AXES OF ANGULAR RATE SENSING
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机译:微机械多传感器,提供加速度感应的1-轴和角速度感应的2-轴
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摘要
A micro-machined multi-sensor that provides 1-axis of acceleration sensing and 2-axes of angular rate sensing. The multi-sensor includes a plurality of accelerometers, each including a mass anchored to and suspended over a substrate by a plurality of flexures. Each accelerometer further includes acceleration sense electrode structures disposed along lateral and longitudinal axes of the respective mass. The multi-sensor includes a fork member coupling the masses to allow relative antiphase movement, and to resist in phase movement, of the masses, and a drive electrode structure for rotationally vibrating the masses in antiphase. The multi-sensor provides electrically independent acceleration sense signals along the lateral and longitudinal axes of the respective masses, which are added and/or subtracted to obtain 1-axis of acceleration sensing and 2-axes of angular rate sensing.
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