ON-THE-MACHINE MEASUREMENT DEVICE FOR SUPER-PRECISION TURNING OPERATIONS USING A ACCELEROMETER

摘要

The present invention is high-precision processing machine using an accelerometer which allows the accelerometer that the probe device is to transfer a lathe tool provided for the X-axis and Z-axis through the accelerometer is installed by measuring the one position coordinate shelf tools to increase the accuracy of the gas phase measurement relates to a gas phase measurement system, provided with a movable member a contact ball which is in contact with the measurement water is provided in the end portion through the air pressure installation so as to be movable up and down on the inside provided with a probe apparatus which is connected to the lathe tool post, the probe device the in the high-precision processing machine vapor measuring system to the gas phase measurement workpiece, a shelf that is installed to be movable in the X-axis and the Z-axis direction versus the tool while the probe device has a single X-axis lathe tool, the Z axis direction through by measuring the linear acceleration and angular acceleration of the movement of the band in order to measure the position coordinates lathe tool The accelerometer is installed and, by combining the distance and the angle of rotation according to which the other hand, Z axis movement of the contact balls and the measurement on contact contact ball water so that the shelf can be obtained the tool one position coordinate measured by the accelerometer measures the measurement of water vapor so can.