LIFT HOOP STRUCTURE FOR LIFTING SEMICONDUCTOR WAFER

摘要

The invention improves the lift hoop in a range that does not cause a defect on the wafer discloses a semiconductor wafer lift hoop structure, which can reduce the bad semiconductor. Semiconductor wafer lift hoop structure according to the present disclosed invention is that a semiconductor wafer lift hoop structure for mounting a wafer on a chuck as vertically movable, provided with a base which is the center is opened and the wafer is mounted on a support that has the same inner diameter as the wafer diameter .