THREE DIMENSIONAL NANO-PATTERNING METHOD USING ATOMIC FORCE MICROSCOPE WITH SEQUENTIAL ANODIC OXIDATION

摘要

The present invention provides an atomic microscope workforce (atomic force microscope: AFM) using nano-transfer method (Nano- relates to patterning), without modifying the conventional AFM, it is an object generally using a potentiometer (potentiometer) is used to provide a method for fast implementation of a three-dimensional pattern repeatedly. ; is a three-dimensional nano-transfer method using an atomic microscope manpower to accomplish the above object of the present invention, dividing the three-dimensional object to be transferred to the pixels (pixel), Z- axes for each pixel by scanning image analysis and measuring the height of the direction (A) and, to make a two-dimensional pattern for each group divided into (A) a plurality of groups by the height of the pixel, the height, measured in the step (layer), it is time for a floor the method comprising: switching to program the voltage pattern of the voltage signal (B), (B) phase voltage pattern layer by layer in a programmed sequence via the potentiometer is applied to the AFM and a step (C) to implement an image.