首页> 外国专利> PERFORATED MEGA-BOULE WAFER FOR FABRICATION OF MICROCHANNEL PLATES (MCPs)

PERFORATED MEGA-BOULE WAFER FOR FABRICATION OF MICROCHANNEL PLATES (MCPs)

机译:用于微通道板(MCPs)制造的穿孔式巨型晶圆

摘要

A mega-boule is used in fabricating microchannel plates (MCPs). The mega-boule has a cross-sectional surface including an island section, an inner perimeter section and an outer perimeter section, each section occupying a distinct portion of the cross-sectional surface. The island section is formed of a first plurality of optical fibers, transversely oriented to the cross-sectional surface, each optical fiber including a cladding formed of non-etchable material and a core formed of etchable material. The inner perimeter section is formed of non-etchable material and is disposed to surround the island section. The outer perimeter section is formed of a second plurality of optical fibers, transversely oriented to the cross-sectional surface, each optical fiber including a cladding formed on etchable material and a core formed of etchable material, and the outer perimeter section is disposed to surround the island section and the inner perimeter section. The first plurality of optical fibers of the island section form transverse microchannels for an MCP, when the island section is etched, and the second plurality of optical fibers of the outer perimeter section form perforated cleave planes, when the outer perimeter section is etched.
机译:巨晶用于制造微通道板(MCP)。巨型晶锭具有包括岛状部分,内周边部分和外周部分的横截面,每个部分占据横截面的不同部分。岛部分由横向于横截面表面的第一多根光纤形成,每根光纤包括由不可蚀刻材料形成的包层和由可蚀刻材料形成的芯。内周边部分由不可蚀刻的材料形成并且被布置为围绕岛状部分。外周部分由横向于横截面表面的第二多根光纤形成,每根光纤包括在可蚀刻材料上形成的包层和由可蚀刻材料形成的芯,并且将外周部分设置为围绕岛部分和内周边部分。当刻蚀岛部时,岛部的第一多根光纤形成用于MCP的横向微通道,当刻蚀外周部时,外周部的第二多根光纤形成穿孔的分裂面。

著录项

  • 公开/公告号EP1695372A2

    专利类型

  • 公开/公告日2006-08-30

    原文格式PDF

  • 申请/专利权人 ITT MANUFACTURING ENTERPRISES INC.;

    申请/专利号EP20040812854

  • 发明设计人 PECK THOMAS N.;

    申请日2004-12-02

  • 分类号H01J43/24;

  • 国家 EP

  • 入库时间 2022-08-21 21:27:01

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