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IR-RU ALLOY ELECTRODE AND FERROELECTRIC CAPACITOR USING THE SAME AS LOWER ELECTRODE
IR-RU ALLOY ELECTRODE AND FERROELECTRIC CAPACITOR USING THE SAME AS LOWER ELECTRODE
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机译:将IR-RU合金电极和铁电电容器用作下电极
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摘要
A ferroelectric capacitor comprises a first electrode comprising an alloy of Ir and Ru, a ferroelectric layer disposed on the first electrode, and a second electrode disposed on the ferroelectric layer. A ferroelectric memory comprises a substrate and a plurality of memory cells arranged on the substrate. Each memory cell comprises a first electrode comprising an alloy of Ir and Ru, a ferroelectric layer disposed on the first electrode, and a second electrode disposed on the ferroelectric layer.
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