CONTINUOUS METAL THIN LAYER DEPOSITING APPARATUS FOR THREE-DIMENSIONAL SHAPE OF POLYMER AND CONTINUOUS METAL THIN LAYER DEPOSITING METHOD THEREOF

摘要

The present invention relates to an apparatus and method for forming a thin metal layer on a three-dimensional polymeric article, and more particularly, to an apparatus and method for forming a thin metal layer on a three-dimensional polymeric article, wherein an organic metal compound is ionized and an ion motion distance thereof is controlled to form a thin metal layer with superior adhesiveness and high uniformity. The present invention provides an apparatus for forming a thin metal layer on a three-dimensional polymeric article using ECR-CVD and an electron beam, comprising a processing chamber capable of defining a hermetic space therein; a radio frequency power supply unit for applying RF power to the interior of the processing chamber; an ECR (Electron Cyclotron Resonance) source supply unit for supplying an ECR source to the interior of the processing chamber; two grids provided within the processing chamber to be spaced apart by a predetermined distance from each other so that a process zone can be defined therebetween; a pulse supply unit for supplying negative voltage pulses to the grids; an introducing/delivering unit for introducing the three-dimensional polymeric article into the processing chamber and delivering it to the outside; and a pumping unit capable of establishing a vacuum state within the processing chamber.