Manufacturing method of low reflective single and multi-crystal silicon solar cells by the modification of local plasma density and it's manufacturing apparatus

摘要

PURPOSE: An apparatus for fabricating low-reflection high-efficiency single crystal and polycrystalline silicon solar cells is provided to remarkably reduce time and cost necessary for production by locally controlling a plasma density without using a photoresist layer mask. CONSTITUTION: A plurality of mounting electrode units into which a solar cell silicon wafer is interposed are installed in a chamber. A gas supply unit supplies reaction gas to the inside of the chamber, installed in one side of the chamber. A vacuum apparatus makes the inside of the chamber vacuum, installed in the other side of the chamber. A power supply unit supplies power to the mounting electrode unit, installed in a side of the chamber.