CONTACTOR FOR SEMICONDUCTOR DEVICE, TEST APPARATUS AND TEST METHOD USING THE CONTACTOR

摘要

The present invention relates to electrically obtain the contact contactor for a semiconductor device and a semiconductor device test using the contactor for testing apparatus and a semiconductor device with a contact for a method and a cleaning method of the contactor for a semiconductor device to the semiconductor device, the micronized terminal and at the same time it can be reliably connected to the contact electrodes with respect to the semiconductor device having, and as a task to prevent damage to the terminals and the contact electrodes. ; Being the wiring substrate (11A) is held on the base unit (12A), for a semiconductor device consisting of the terminal 21 of the contact electrode 14 and the semiconductor device 20 of the wiring substrate (11A) is to have a contact pressure connected electrically in the contact, the contact to generate a base unit (12A) and the position maintaining force applying mechanism 17, a semiconductor device 20 and the wiring substrate (11A), the contact pressure and for generating a position maintaining force between the wiring substrate (11A) installing the pressure generation mechanism 16, and also configure the position maintaining force and the contact pressure to be operated independently. ; Semiconductor, contacts, test device