Micro electro mechanical system sensor capable of simultaneously sensing pressure, temperature and acceleration, fabrication method therefor, and tire pressure monitoring system using the same

摘要

MEMS sensors to measure pressure, temperature, and acceleration in accordance with the invention at the same time is of a single chip having a pressure sensor, temperature sensor, and the acceleration sensor formed on a silicon wafer, and a silicon wafer. Manufacturing method of the MEMS sensor of the present invention are thin-film temperature sensor on a first side of the forming pressure resistance and pressure resistance of the acceleration sensor of the pressure sensor to a first side of preparing a silicon wafer, a silicon wafer, a silicon wafer forming a metal resistor, and optionally the first and second surfaces of the step of forming the electrode and wiring, the electrode pad of the contact pads and the acceleration sensor of the temperature sensors of the pressure sensor, and a silicon wafer to a first face of the silicon wafer It is etched to form a mass composed of a step of the support beam of the diaphragm of the pressure sensor and acceleration sensor to. MEMS sensor of the present invention may be useful to measure the pressure, temperature, and acceleration at the same time, or correct an error in accordance with the pressure measured during the temperature and acceleration. ; A pressure sensor, a temperature sensor, acceleration sensor, an integrated tire pressure motif gettering