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CRYOPUMP WITH SELECTIVE CONDENSATION AND DEFROST AND A METHOD FOR PREFERENTIAL DEFROST
CRYOPUMP WITH SELECTIVE CONDENSATION AND DEFROST AND A METHOD FOR PREFERENTIAL DEFROST
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机译:选择性冷凝和降温的低温泵及优先降温的方法
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摘要
The cryopanel of a cryopump can be preferentially defrosted to remove an acid-forming or toxic gas while leaving a second gas substantially condensed upon the cryopanel thereby limiting interaction between the vapor phases of the two gases. The cryopanel is warmed to a temperature within a selective defrost range at which the first gas selectively sublimates from the cryopanel. The temperature of the cryopanel is then maintained at a temperature within this range until the cryopanel is substantially cleared of the first gas leaving the second gas substantially undisturbed as a condensate upon the cryopanel. In a preferred embodiment, the cryopanel is maintained at about 50 to 85K during standard operation before being defrosted.
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