APPARATUS OF AUTOMATED FOCUSING AND METHOD FOR AUTOMATED FOCUSSING USING THE SAME

摘要

The present invention relates to an auto -focusing auto- focusing apparatus and method using it , which includes a scanning electron microscope and a focusing unit and a detector and the a / D converter and control unit comprising a controller , an input unit for inputting the predetermined information to the controller , using an automatic focusing apparatus including a display showing the operation of the controller , visually , focusing quantifying the evaluation value , and comparing the determined level of the digitized allow focusing evaluation value and a predetermined focus evaluation value and the focus evaluation value is digitized as increasing the depth of focus of the focusing range is less than the allowable level of repeatedly focusing characterized in that . According to this, the focus is not a bad problem to measure the defect pattern will be solved as bad .