AUTOMATED FOCUSING METHOD FOR CHARGED-PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus to allow automated focusing of a charged particle beam in the scanning electron microscope or the like. ;SOLUTION: In the automated focusing method for a charged particle beam equipment in which focusing state of electron beam on the specimen is changed stepwise and the electron beam is set up in the optimum focusing state at each stage based on the detected signal obtained in accordance with the electron beam scanning in a specified region on the specimen, it is featured to conduct a plurality of the electron beam scanning in a plurality of scanning forms in the specified region on the above-mentioned specimen, select the optimum scanning form based on the detected signal obtained by scanning the electron beam or every scanning form, and perform the automated focusing by means of the selected scanning form.;COPYRIGHT: (C)2001,JPO