COMPOSITE STRUCTURE OF TRANSPARENT CONDUCTING FILM USING DIAMOND-LIKE CARBON FILM AS BUFFER LAYER

摘要

PURPOSE: A composite transparent conducting film using a diamond-like carbon film as a buffer layer is provided to prolong a life of products such as a display element and a touch panel. CONSTITUTION: The composite transparent conducting film using a diamond-like carbon film as buffer layer comprises a transparent substrate(10); a buffer layer(20) of diamond-like carbon(DLC) formed on the transparent substrate; and a transparent conducting film formed on the buffer layer. The DLC buffer layer is formed by a plasma enhanced vapour deposition method. The DLC buffer layer has a structure of a-C:H(amorphous hydrogenated carbon).