TiAlN-based multi-layer hard film with high wear and oxidation resistance

摘要

This invention relates to the oxidation resistance and wear resistance are excellent TiAlN -based multilayer hard films , and more particularly Al content is different TiAlN film is a laminated multi-layer hardness value of the unit of Figure carbide is adjusted to more than 40 GPa layer (A) and , Al content of 70% or more as high oxidation resistance and excellent TiAlN film is laminated in a single layer of 25 to unit layer hardness of 30 GPa (B) by being repeatedly forms a stacked layer structure in a certain thickness ratio , increase wear resistance and the oxidation resistance at the same time as well as the new Sikkim microstructures having higher hardness than that of the conventional thin film coating covering relates to the TiAlN -based thin-film multilayer hard .