Photoresists with vinyl - 4 - tetrahydropyranyloxybenzal - vinyl - 4 - hydroxybenzaldehydes are described which - vinyl tetrahydropyranyl ether - - vinyl acetate copolymer, and with vinyl - 4 - tetrahydropyranyloxybenzal - vinyl tetrahydropyranyl ether - - vinyl acetate copolymer

摘要

Photoresist with a vinyl - 4 - tetrahydropyranyloxybenzal - vinyl tetrahydropyranyl ether - - vinyl acetate copolymer, represented by the following general formula i: whereinx mol percent in the range from 5 to 70 are;y mol percent in the range from 1 to 60, andz mole percent in the range from 0 to 40 are.