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Method and a device for measuring surfaces, in particular for the measurement of the spherical and aspherical surfaces.
Method and a device for measuring surfaces, in particular for the measurement of the spherical and aspherical surfaces.
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机译:用于测量表面,特别是用于测量球形和非球形表面的方法和装置。
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摘要
Apparatus for measurement of surfaces of a on a receptacle or definable test specimen (8) in a polar coordinate system, the from a pushbutton (3) are scanned in contacting fashion and whose (3) stroke of a length interferometer (4) is measured, to an evaluation unit, on which the output signal of the lengths of the interferometer (4) on the basis of the movement of the push button, as well as the relative movement between the receiving and sensor signals indicative of contact, and the evaluates the output signal from a drive for the push button (3) as well as an air bearing (2) and drive means, which the feeler in order to achieve a for this are arranged at a distance from axis of rotation, and with a joint (9) between the pushbutton (3) and the air bearing (2), characterised by the following features:– the drive mechanism has, in addition to the second drive for the push button (3) a first drive for the receptacle on,– the first drive rotates the receptacle in order to achieve an as a result of this and, thus, by the surface to be measured first axis of rotation extending,..
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