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Method and a device for measuring surfaces, in particular for the measurement of the spherical and aspherical surfaces.

机译:用于测量表面,特别是用于测量球形和非球形表面的方法和装置。

摘要

Apparatus for measurement of surfaces of a on a receptacle or definable test specimen (8) in a polar coordinate system, the from a pushbutton (3) are scanned in contacting fashion and whose (3) stroke of a length interferometer (4) is measured, to an evaluation unit, on which the output signal of the lengths of the interferometer (4) on the basis of the movement of the push button, as well as the relative movement between the receiving and sensor signals indicative of contact, and the evaluates the output signal from a drive for the push button (3) as well as an air bearing (2) and drive means, which the feeler in order to achieve a for this are arranged at a distance from axis of rotation, and with a joint (9) between the pushbutton (3) and the air bearing (2), characterised by the following features:– the drive mechanism has, in addition to the second drive for the push button (3) a first drive for the receptacle on,– the first drive rotates the receptacle in order to achieve an as a result of this and, thus, by the surface to be measured first axis of rotation extending,..
机译:在极坐标系中用于测量容器或可定义的试样(8)的表面的设备,以接触方式扫描按钮(3)的表面,并测量其长度(3)的长度干涉仪(4)的行程到评估单元,根据按钮的移动,干涉仪(4)的长度的输出信号,以及表示接触的接收信号和传感器信号之间的相对移动,进行评估来自按钮驱动器(3)的驱动器,空气轴承(2)和驱动器的输出信号,为了实现此目的,塞尺与旋转轴相距一定距离,并带有一个关节(9)在按钮(3)和空气轴承(2)之间,其特征在于:-除按钮(3)的第二驱动器外,驱动机构还具有用于插座的第一驱动器, –第一个驱动器旋转插座,以实现结果,因此,通过待测表面的第一旋转轴延伸。

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